Products & TechnologyTechnology
Key components
Digital pressure gauges
Every process tank has a digital pressure gauge with data output, monitoring pump pressure and filter condition at all times for stable operation and product quality.
High-frequency DC rectifiers
European COSOUL high-frequency DC rectifiers improve copper plating stability and uniformity.
Ultrasonic digital flow meters
KEYENCE (Japan) ultrasonic digital flow meters measure precisely and run stably, underpinning reliable quality.
Bellows pumps
Ultra-clean PTFE bellows pumps keep the chemistry clean.
PLC control
Top-spec KEYENCE (Japan) KV-8000 series PLCs raise operating speed and equipment stability.
Wafer-handling robots
Imported JEL (Japan) dual-arm wafer-handling robots: efficient and stable.
Industrial IoT SCADA software
Licensed industrial IoT SCADA software for control and monitoring, with SECS/GEM communication and data transfer. (Software architecture illustration)
Automatic loading and run monitoring
Automatic loading and unloading for easy operation; a wafer counter at every station shows wafer counts at a glance; an internal monitoring system makes equipment status clear.
PFA pneumatic diaphragm valves
Imported PFA pneumatic diaphragm valves keep the chemistry pure and extend service life.
Ultra-pure PFA tubing
Chemistry and rinse lines use imported ultra-pure PFA tubing, keeping the chemistry pure and extending service life.
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