Product Overview
- For through-glass via etching in wafer-level and panel-level applications, configured for the required substrates and processes.
- Process configurations are available for acidic and alkaline etching.
- Vertical etching tanks provide maintenance access and can be combined with ultrasonic cleaning tanks.
- A concealed overhead handling system can be configured to reduce exposure of the handling mechanism to corrosive process vapours.
- Industrial touchscreen control and industrial IoT configuration software, with SECS/GEM communication and data transfer.
Equipment configurations can be tailored to requirements. Contact us for detailed specifications, process performance and test conditions.